Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source

High Efficiency Collector for Laser Plasma EUV Source

Imaging Diagnostics of Debris from Double Pulse Laser-Produced Tin Plasma for EUV Light Source

The dynamics of debris from laser produced Tin (Sn) plasma was investigated for EUV light source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 laser were also investigated by the laser-induced fluorescence imaging method and a high-speed imaging, respectively. After the pre-pulse irradiation...

Evaluation of lab-scale EUV microscopy using a table-top laser source

Nanoimaging using soft X-ray and EUV laser-plasma sources

In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial reso...

Diagnostics for laser plasma EUV sources

A high repetition-rate laser plasma source, possessing distinct radiation and particle emission characteristics, is now a principal candidate light source for the next generation of technology for the fabrication of computer chips. For these sources to satisfy this critical need they will need to meet unprecedented levels of performance, stability and lifetime. We review here some of the princi...